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Specialty Chemistry Forums => Materials and Nanochemistry forum => Topic started by: TDyoh3908 on May 11, 2017, 12:40:10 PM

Title: Please help me!! :'((wet etching indium)
Post by: TDyoh3908 on May 11, 2017, 12:40:10 PM

Hi i'm a student to study polymer engineering & semiconductor.
i want to build indium pattern on the substrate. In the process, i need to wet etch(chemical etch) the indium. but i can't found what etchant is.

every guys please help me :'(
 

Title: Re: Please help me!! :'((wet etching indium)
Post by: Enthalpy on May 12, 2017, 11:56:26 AM

Welcome, TDyoh3908!

Did you check the literature on Internet? First Google page:
http://www.cleanroom.byu.edu/wet_etch.phtml
https://engineering.dartmouth.edu/microeng/processing/etching/Miscellaneous%20Etchants.pdf
http://vector.umd.edu/images/links/Handbook_of_Metal_Etchants.pdf

The final choice uses to depend on more constraints than the material to be etched. Like: not destroy the patterning mask nor the underlying materials, keep the wafers clean, and so on.