[GrymDe$tiny]

Has anybody taken apart an MKS 1179A mass flow controller to make repairs? If so where can I get replacement parts for it?

I have searched the web and it seems like MKS does not want anybody repairing their own equipment. I cannot find any parts diagrams or lists, and I cannot find a distributor that sells replacement parts. The only thing that I find is links to either MKS or one of their authorized repair shops.

As a graduate student my project does not have a large enough budget for either a repair bill or a replacement controller.

[abdullahzaid]

Mass Flow Controller & Mass Flow Meter Products from MKS Instruments ... G-Series Thermal Mass Flow Controllers & Meters with Fast & Repeatable ...