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Author Topic: Please help me!! :'((wet etching indium)  (Read 1067 times)

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TDyoh3908

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Please help me!! :'((wet etching indium)
« on: May 11, 2017, 06:40:10 AM »

Hi i'm a student to study polymer engineering & semiconductor.
i want to build indium pattern on the substrate. In the process, i need to wet etch(chemical etch) the indium. but i can't found what etchant is.

every guys please help me :'(
 
« Last Edit: May 11, 2017, 08:03:18 AM by TDyoh3908 »
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Enthalpy

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Re: Please help me!! :'((wet etching indium)
« Reply #1 on: May 12, 2017, 05:56:26 AM »

Welcome, TDyoh3908!

Did you check the literature on Internet? First Google page:
http://www.cleanroom.byu.edu/wet_etch.phtml
https://engineering.dartmouth.edu/microeng/processing/etching/Miscellaneous%20Etchants.pdf
http://vector.umd.edu/images/links/Handbook_of_Metal_Etchants.pdf

The final choice uses to depend on more constraints than the material to be etched. Like: not destroy the patterning mask nor the underlying materials, keep the wafers clean, and so on.
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