[paimeiguel]

Hi everyone!
I want to clean my glass microchannels after they get clogged with dust that looks fiber-like, so I am assuming it is either from paper or cloth. Any suggestions? I have tried the usuals: NaOH, HCl. But none of them has convining dissolving results... any ideas?
The channels are made in fused silica with an insulating layer of silicon oxynitride. Thaks for the *delete me*

[fledarmus]

My standby with recalcitrant organic materials on inert silicates is chromic acid cleaning solution - for microchannels, I would use it in an ultrasonic bath. Unfortunately it is incredibly toxic, incredibly corrosive, and creates huge disposal headaches.

[curiouscat]

Piranha Solution (conc. H2SO4+H2O2 )? That's nasty too though but very effective I hear. Not to be trifled with.